As is known, the flexure-based non-resonant type EVC vibrator has more flexibility and modulation ability compared with the resonant type EVC vibrator and it has been widely concentrated in recent years. The failing edge of the voltage spans 40s, which is short enough to ensure a slip motion. The authors declared no potential conflicts of interest with respect to the research, authorship, and/or publication of this article. As PhD students, we found it difficult to access the research we needed, so we decided to create a new Open Access publisher that levels the playing field for scientists across the world. Figure 17 shows the results obtained when we installed two driving mechanisms in the actuator but only applied voltage to one piezoelectric stack. Piezo crystals can change their structure in just a few thousandths of a second when electrically charged by expanding slightly. 2, pp. P. E. Tenzer and R. B. Mrad, A systematic procedure for the design of piezoelectric inchworm precision positioners, IEEE/ASME Transactions on Mechatronics, vol. 66, no. An, J. W. Li, and W. J. Zhang, , Piezoelectric frictioninertia actuatorA critical review and future perspective, K. Chen, J. Wen, G. Cheng, J. Ma, and P. Zeng, , An asymmetrical inertial piezoelectric rotary actuator with the bias unit, J. Li, X. Zhou, H. Zhao, M. Shao, N. Li, S. Zhang, and Y. As shown in Figure 7(a), two perpendicular leaf-spring flexure hinges were applied to decouple the 2D motion. The shell, which prevents the actuator from the environment, is fixed on the joint plate by screws and also rotates with the bearing. Step 2: A response surfaces methodology is adopted to create a predictive model for the design points and the response values. 40, pp. The 3D model of the compliant mechanism is shown in Figure 10(a). The groove is processed by slow wire cutting inside the mechanical structure, and the piezoelectric stack is placed in the groove for driving. J. Guo, S. K. Chee, T. Yano, and T. Higuchi, Micro-vibration stage using piezo actuators, Sensors and Actuators A: Physical, vol. J. Li, H. Zhao, H. Qu et al., A piezoelectric-driven rotary actuator by means of inchworm motion, Sensors and Actuators A: Physical, vol. Open Access is an initiative that aims to make scientific research freely available to all. At the same time, the rotor remains still while the friction block returns to its original position; that is, the friction block slips on the bearing. WebAmong them, the stick-slip piezoelectric actuators are favored by researchers due to their simple structure [19,20], low manufacturing and assembly requirements [21,22], easy Shamoto and Moriwaki applied the vertical piezoelectric actuator configuration to achieve the EVC [5]. 61, no. One is a direct Home > Shamoto and Moriwaki applied the vertical piezoelectric actuator configuration to Compared with the piezoelectric actuators serial drive configuration, the parallel drive configuration of piezoelectric actuators is more easy to obtain a higher working bandwidth. 223, pp. The actuator has merits of high resolution, good stability, high speed, infinite stroke, and compact size and has good application potential not only in an optical path adjustment system but also for other uses, such as positioning. Only one piezoelectric stack was installed and used in some experiments while two piezoelectric stacks were installed and used in other experiments. The results of dynamic performance are shown in Figure 9(d). Offline tests were carried out to evaluate the performance of the optimization vibrator. Enter words / phrases / DOI / ISBN / authors / keywords / etc. It can be seen that the maximum tracking error along z1 axis is 0.7m, which is 2.9% of the maximum input displacement. The EVC method is first proposed based on a 2D type EVC vibrator. Contact our London head office or media team here. 12, pp. The sweep experiments were conducted by setting the input voltage amplitudes to 5V and the frequency from 0 to 10kHz linearly. (b) Mechanical structure of compliant mechanism. Figure 10(e) shows the dynamic performances. The direct piezo effect, employed for When the piezoelectric stack is driven by a sawtooth waveform, it undergoes extension and contraction deformation, resulting in the friction block moving with respect to the bearing in a stick-slip manner. When light hits the beam vertically, and the displacement measured by the laser sensor was about 100m within a small angular displacement, the conversion formula for the output angular displacement iswhere S is the displacement measured by the laser sensor and R is the effective turning radius of the laser point on the beam. The actuator rotates well at a lower speed. Then the compliant mechanisms were assembled by screws connection. Part I: ideal excitation, Sensors and Actuators A: Physical, vol. London, SW7 2QJ, WebActuators use piezoelectricity to power devices like knitting and braille machinery, video cameras, and smartphones. Then a prototype was manufactured and the performance tests were conducted through the experimental setup which is shown in Figure 10(b). The micro-nano motion resulting from elastic deformation of flexure hinge can guarantee the modulation ability and accuracy, which makes it more suitable for the manufacturing of micro-nano structured surfaces. In this work, a flexure-based EVC vibrator with vertical piezoelectric actuator configuration was proposed. (a) 3D model. The prototype was manufactured and the experimental tests were carried out to evaluate the performance. Figure 6(b) shows evident stick-slip motion. Fan, and H. Fu, , Development of a compact 2-DOF precision piezoelectric positioning platform based on inchworm principle, This option allows users to search by Publication, Volume and Page. (d) Resolution tests. An, J. W. Li, and W. J. Zhang, Piezoelectric friction-inertia actuator-a critical review and future perspective, The International Journal of Advanced Manufacturing Technology, vol. Books > The proposed actuator provides stable and accurate rotary motion and realizes a high velocity. In EVAM, the elliptical vibration cutting (EVC) is a typical method for turning. In recent 10 years, the flexure-based 3D type EVC vibrator developed rapidly. WebA piezoelectric actuator converts an electrical signal into a precisely controlled physical displacement (stroke). Figure 12(f) shows the tracking performance in x-direction. Afterward, the rotor rotates though a small angle anticlockwise, and the friction block and piezoelectric stack return to the same position as for the initial state. Publishing on IntechOpen allows authors to earn citations and find new collaborators, meaning more people see your work not only from your own field of study, but from other related fields too. (d) Experimental results of dynamic performance [13]. To this end, two mounting slots with high flexibility are specially designed for improving output displacement. In general, the mechanical structure decoupling design is usually adopted. WebPiezoelectric actuators are transducers that convert electrical energy into a mechanical displacement or stress based on a piezoelectric effect, or vice versa. WebWe recommend that piezo stacks operate in the range 0 to 80 MPa. A new type of 2 degrees of freedom piezo-actuated pseudo-decouple compliant mechanism was developed which considering the influence of the decoupling angle [12]. Compared with the former one, this vibrator has higher modulation ability and commonality for lathes with different configurations. This work presents another long-stroke design of an inchworm piezoelectric walking actuator to obtain stable and precise linear motion. Figure 6(d) and (e) show the tracking accuracy and coupling motion in Z direction and Y direction. Licensee IntechOpen. Similarly, the parasitic motions along the x and z axes directions are about 1.11% and 0.46% with respect to the motion along y-axis direction, respectively. There are almost no overshoot and steady errors by utilizing a typical PID controller. Compared with the resonant vibration, the non-resonant type EVC vibrator provides much higher flexibility due to the elastic deformation of compliant mechanism. Velocity under different frequencies with a driving voltage of 93V. Velocity under different applied voltages. Output displacement under different frequencies of a 93V sawtooth waveform. (e) Results of the frequency responses. It also provides guidance on designing new piezoelectric actuators for improving their mechanical output performances. Simulation results show that the rotational speed of the actuator increases with the frequency of the driving voltage, while the angular step displacement increases with the amplitude of the driving voltage. In addition, a typical proportion-integration-differentiation controller is employed for the feedback control. This experiment simulates the situation that one piezoelectric stack is faulty and does not provide the expected driving motion. The main contribution of this work is to provide a comprehensive review of recent studies on the non-resonant type piezoelectric actuators. (d) Simulated tool locus. Contact our London head office or media team here. Figure 11(d) shows that the natural frequency along z, x1 and x2 axes are about 1901Hz, 1889Hz and 1895Hz, respectively, which is enough for ultra-precision machining. (a) Mechanical structure of compliant mechanism. (f) the synthesized cutting tool locus and the projections [15]. Especially for the difficult-to-cut materials, it is impossible to manufacture complex micro/nano features by using traditional cutting methods. When the properties of the PE part and rotor are decided, the performance of the piezoelectric actuator is dominated by the input driving voltage signal and the friction force in the stick-slip motion. Whats more, the tracking performance along y and z axial directions were also tested during cutting, results of which are shown in Figure 10(f). The ellipse locus of cutting tool can be obtained through the same or different modes coupling in different directions with the nearly same vibration frequency. First, we see that the displacement has a good linear relationship with time and the displacement has no visible backwards motion. Abstract. High keeping suspension. The dynamic model was established based on Lagrangian principle. As shown in Figure 6(b), the first natural frequencies along Z direction and Y direction are 1257.74Hz and 1896.19Hz, respectively. The summary and classification of the actuation modes used in the multi-DOF piezoelectric motion stages are presented and the output performances of the stages are compared, and the state of the arts of the stage are discussed and summarized. The rhombic mechanism is commonly used to amplify the deformation of the piezoelectric stack. The mode of vibration in thrust direction corresponds to the natural frequency of 7432Hz. 5 Princes Gate Court, Simple conclusions are drawn from the results shown in Figure 6. It can be seen that the first natural frequency is about 1200Hz. For easy analysis, three axes were defined as follows: axis along PEA1 motion direction was defined as x1, axis along PEA2 motion direction was defined as x2, and axis along PEA3 motion direction was defined as z. Additionally, the kinematic modeling was established. A Piezo actuator consists of hundreds of ceramic wafers stacked one above the other in the injector. Direct-drive actuators have a high positioning resolution and compact structure but limited stroke [79]. It has been validated that EVC can improve the machinability of difficult-to-cut materials [2, 3, 4]. Gu, L.-M. Zhu, and C.-Y. London, SW7 2QJ, Structure details were proposed and experimental tests of the prototype were conducted. Irrespective of whether the driving voltage is applied to one or two piezoelectric stacks, the actuator rotates through 360 under a low applied voltage. Illustration of 3D model, experimental setup and testing results. Multi-degree of freedom piezoelectric actuators are strongly needed for industrial applications, especially when manipulating a large and heavy mirror or lens in an optical system. Y. Hu, R. Wang, J. Wen, and J.-Q. The actuator has dimensions of 56mm56mm12mm and a mass of 51.68g. A series of experiments were conducted to test the performance and characteristics of the actuator. 1, p. 7, 2017. It should be noted that the noise during cutting is slightly larger than that in offline testing. Simulation results of rotation displacement of the PA under 500Hz sawtooth waveform at different amplitudes. There are no steady errors. Two compliant mechanisms were independently manufactured considering the complexity of machining. Then the analytical stiffness modeling was carried out. 669685, 2012. The amplitude-frequency responses are shown in Figure 3(c). The testing experiments were carried out to evaluate the performance. Figure 5(g) shows the input signal, the tool vibration locus in 3D space and the projection in xy plane. (g) Input signals and tool vibration locus [9]. (c) Experimental setup. According to the optimization results, a prototype was fabricated with the 7075 T6 aluminum. Then, the predicted error should be checked, the other design of experiments methodology or increased experimental design points should be considered when the error is larger than the requirements. Figure 12(e) shows the measured tool locus which is an ellipse in 3D space. A piezoelectric actuator is an electrically controlled positioning element that functions based on the piezoelectric effect. 2 Working principle The rotary actuator consists of a rotator, two pieces of piezoelectric bimorph, two substrates and two masses as is shown in Fig. Constraints: Lc/L<5%, max
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